In surface micromachining, layer by layer fabrication is performed. The patterning is performed through a MEMS compatible pattern transfer method, photolithography. A specific material layer is deposited on the wafer and then a selective etching is done under a mask which is developed by a photolithographic step. #cleanroom, #hepa filters, #fume hoods, #class ratings, #MEMS, #microfabrication, #micromachines, #mems, #microtechnology, #silicon, #silicon technology, #siliconvalley, #siliconeproduct, #mems global market, #mems sensors, #mems actuators, #surface microfabrication, #bulk microfabrication, #silicon wafer, #silicon processing, #reproducible, #reliable, #mass producible, #photolithography, #patternmaking