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What Plasmas Have to Do with Computer Chips

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Illinois EnergyProf

The first integrated circuit is shown and the progression of size of the circuits over time. Eight orders of magnitude of improvement over the space 40 years. Moore’s law explained, visualized and how far it can go is estimated. How plasmas are used to make computer chips through deposition, lithography and etching. Detailed views inside a computer chip are shown. Patterning for lithography is examined and the subject of extreme ultraviolet (EUV) discussed. How the chips are patterned in the meantime before EUV is ready by double, and quadruple patterning. The plasma machines which can do the deposition and etching even one atomic layer at a time.

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